Beamline 3.2.1

LIGA

Status	Operational; restricted access
Source	Bend
Minimum energy (eV)	2,000
Maximum energy (eV)	15,000
Research areas	Applied Sciences Biological Sciences
Technique category	Microscopy/Imaging X-Ray Footprinting
Flux/Brightness	~10¹⁸ photons/sec in a 10 x 1 cm spot
Resolving power	no monochromator
Access modes	Onsite Remote - ALS-operated
Additional notes	Beamline 3.2.1 is used for LIGA, a german language acronym Lithographie, Galvanoformung, Abformung (Lithography, Electroplating, and Moulding) that describes a fabrication technology used to create high-aspect-ratio (HAR) microstructures. The beamline is also used to develop other synchrotron techniques including X-ray Footprinting, which is moving to beamline 3.3.1.
Primary contact(s)	Andrew Doran adoran@lbl.gov 510-495-2845
Beamline phone number	510-495-2032